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CONTRIBUTORS:
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PUBLISHER:
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SERIES TITLE:
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YEAR:
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1995
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PUB TYPE:
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Book
(ISBN 0792396197 )
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VOLUME/EDITION:
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PAGES (INTRO/BODY):
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xix,
468 p.
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SUBJECT(S):
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Semiconductor wafers; Factory management; Design and construction
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DISCIPLINE:
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No discipline assigned
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LC NUMBER:
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TK7871.85 .A844 1995
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HTTP:
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LANGUAGE:
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English
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PUB ID:
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103-306-436
(Last edited on
2002/02/27 18:42:27 US/Mountain)
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SPONSOR(S):
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ABSTRACT:
Includes bibliographical references and index.
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STATISTICS
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